Friedrich Schäffler, Michael Mühlberger, Peter Bauer, Markus Draxler,
"Non-destructive quantitative analysis of the Ge concentration in SiGe quantum wells by means of low energy RBS"
, in Nuclear Instruments and Methods in Physics Research Section B, Vol. 240, Seite(n) 733, 2005, ISSN: 1872-9584
Original Titel:
Non-destructive quantitative analysis of the Ge concentration in SiGe quantum wells by means of low energy RBS
Sprache des Titels:
Englisch
Journal:
Nuclear Instruments and Methods in Physics Research Section B