A Novel Micromachined Liquid Property Sensor Utilizing a Doubly Clamped Vibrating Beam
Sprache des Titels:
Eurosensors XX Proceedings 2006
A novel miniaturized sensor for the online measurement of the mechanical properties of a viscous liquid utilizing a resonating beam has been designed and fabricated in silicon technology. The modeling of the electromagnetic actuation of the device is discussed and the response of a first prototype was experimentally characterized using impedance spectroscopy.