Roman Beigelbeck, Franz Kohl, Franz Keplinger, Bernhard Jakoby,
"CLOSED-FORM 3D-ANALYSIS OF MEMBRANE-BASED MICROMACHINED SENSORS MEASURING THE THERMAL PROPERTIES OF LIQUIDS"
: Proceedings Eurosensors XXII, Dresden, Germany, 7-10 Sept. 2008, Seite(n) 76-79, 2008
Original Titel:
CLOSED-FORM 3D-ANALYSIS OF MEMBRANE-BASED MICROMACHINED SENSORS MEASURING THE THERMAL PROPERTIES OF LIQUIDS
Outstanding features of micromachined calorimetric sensors make these devices well suited for measuring
the thermal properties of resting liquids. Based on a novel 3D analytical model, essential design rules
for the realization of optimized membrane-based thermal property sensors can be derived. These theoretical
results are verified by measurements obtained from a device prototype.
Forschungs-