Thomas Lederer, Wolfgang Hilber,
"Fast thermopneumatic actuation of thin PDMS membranes for the use as microfluidic valves and pumps"
: Proc. Mikroelektronik 08, 15.-16. Oct. 2008, 2008, ISBN: 978-3-85133-049-6
Fast thermopneumatic actuation of thin PDMS membranes for the use as microfluidic valves and pumps
Sprache des Titels:
Proc. Mikroelektronik 08, 15.-16. Oct. 2008
In this paper we present a concept for fast thermopneumatic actuation of a thin PDMS membrane
by the use of a piston-like head of liquid and a Peltierelement for controlling the temperature of the working fluid. By adjusting the temperature of the working fluid, in our case ethanol, the volumetric thermal expansion is controlled, which is in turn directly coupled to membrane deflection. Pinch-off and subsequent release
of a microfluidic channel above the membrane is achieved in a few seconds. The proposed setup can be potentially utilized for the realization of fast microfluidic valves and pumps.