Dieter Bäuerle,
"Production of Microstructures by Laser Pyrolysis"
, in R.M. Osgood et al.: Proc. MRS Symp. "Laser Diagnostics and Photochemical Processing for Semiconductor Devices", Serie Proc. MRS Symp., Vol. 17, Elsevier North Holland, Seite(n) 19, 1983
Original Titel:
Production of Microstructures by Laser Pyrolysis
Sprache des Titels:
Englisch
Original Buchtitel:
Proc. MRS Symp. "Laser Diagnostics and Photochemical Processing for Semiconductor Devices"
Forschungs-