Tamas Szörényi , Klaus Piglmayer, Dieter Bäuerle,
"Pyrolytic Laser-Induced Chemical Vapor Deposition (LCVD) of Microstructures"
: Trends in Quantum Electronics, Serie Proceedings of SPIE - The International Society for Optical Engineering, Vol. 1033, Seite(n) 319, 1989
Original Titel:
Pyrolytic Laser-Induced Chemical Vapor Deposition (LCVD) of Microstructures
Sprache des Titels:
Englisch
Original Buchtitel:
Trends in Quantum Electronics
Serie:
Proceedings of SPIE - The International Society for Optical Engineering