K. Osvay, Z. Bor, B. Racz, Johannes Heitz, I.N. Ross,
"A Laser Micromachining Projection Microscope"
: 16th Congress of the International Commission for Optics: Optics as a Key to High Technology, Serie Proceedings of SPIE - The International Society for Optical Engineering, Vol. 1983, Seite(n) 751, 1993
Original Titel:
A Laser Micromachining Projection Microscope
Sprache des Titels:
Englisch
Original Buchtitel:
16th Congress of the International Commission for Optics: Optics as a Key to High Technology
Serie:
Proceedings of SPIE - The International Society for Optical Engineering