Klaus Piglmayer, Helmut Schieche, R. Chabicovsky,
"Laser-Induced Deposition and Etching of Tungsten-Microstructures"
: Second GR-I International Conference on New Laser Technologies and Applications, Serie Proceedings of SPIE - The International Society for Optical Engineering, Vol. 3423, Seite(n) 315, 1998, Laser-Induced Deposition and Etching of Tungsten-Microstructures K. Piglmayer, H. Schieche, R. Chabicovsky: Proc. of the 2nd GR-I International Conference on "New Laser Technologies and Applications" Olympia, June 1997, SPIE 3423 (1998), 315 (5 pages)
Original Titel:
Laser-Induced Deposition and Etching of Tungsten-Microstructures
Sprache des Titels:
Englisch
Original Buchtitel:
Second GR-I International Conference on New Laser Technologies and Applications
Serie:
Proceedings of SPIE - The International Society for Optical Engineering
Volume:
3423
Seitenreferenz:
315
Erscheinungsjahr:
1998
Notiz zum Zitat:
Laser-Induced Deposition and Etching of Tungsten-Microstructures K. Piglmayer, H. Schieche, R. Chabicovsky: Proc. of the 2nd GR-I International Conference on "New Laser Technologies and Applications" Olympia, June 1997, SPIE 3423 (1998), 315 (5 pages)
Forschungs-