High Performance Acoustofluidic Particle Focusing in Silicon-Based and Polymer-Based Devices Using Lateral Modes of Plate Transducers
Sprache des Titels:
We present the employment of lateral modes of piezoceramic plate transducers using the transverse piezoelectric effect for rapid acoustophoretic particle focusing in both silicon-based and polymer-based microfluidic chips. Based on the results of numeric simulations, we designed and fabricated high-performant silicon/glass chips capable of particle focusing in the experiment with an acoustic energy density Eac of more than 100 J m-3 at 22 Vpp and 544 kHz actuation. In a polymer-based device we observed particle focusing with Eac reaching about 15 J m-3 at 22 Vpp and 508 kHz actuation. Here, we are able to solve the paradox of particle focusing?which is assumed to require an anti-symmetrical pressure wave inside the channel?in a completely symmetric and symmetrically actuated system with the help of simulations. Although our models and investigations are similar to other work, e.g. [1-5], to the best of our knowledge, we are the first who explicitly employ lateral modes of piezoceramic plate transducers for acoustofluidic particle manipulation.