M. Mosbacher, H.-J. Münzer, M. Bertsch, V. Dobler, N. Chaoui, Jakub Siegel, Roland Oltra, Dieter Bäuerle, J. Boneberg, Paul Leiderer,
"Laser assisted particle removal from silicon wafers"
, in K.L. Mittal: Particles on surfaces 7: detection, adhesion and removal, VSP, Utrecht, Seite(n) 291, 2002, ISBN: 978-9067-64372-6, Laser cleaning for particle removal from silicon wafers, M. Mosbacher, J.H. Münzer, V. Dobler, J. Boneberg, P. Leiderer, N. Chaoui, J. Siegel, J. Solis, C.N. Alfonso, R. Fourrier, G. Schrems, D. Bäuerle: Abstract submitted for 7th International Symposium on particles on surfaces: Detection, Adhesion and Removal, June 9-21, 2000 Newark NJ
Original Titel:
Laser assisted particle removal from silicon wafers
Sprache des Titels:
Englisch
Original Buchtitel:
Particles on surfaces 7: detection, adhesion and removal
Veröffentlicher:
VSP
Verlagsanschrift:
Utrecht
Seitenreferenz:
291
Erscheinungsjahr:
2002
Notiz zum Zitat:
Laser cleaning for particle removal from silicon wafers, M. Mosbacher, J.H. Münzer, V. Dobler, J. Boneberg, P. Leiderer, N. Chaoui, J. Siegel, J. Solis, C.N. Alfonso, R. Fourrier, G. Schrems, D. Bäuerle: Abstract submitted for 7th International Symposium on particles on surfaces: Detection, Adhesion and Removal, June 9-21, 2000 Newark NJ
Forschungs-