Klaus Piglmayer, Helmut Schieche, R. Chabicovsky,
"On the reaction mechanism in laser-induced deposition of Tungsten microstructures from WF6/H2"
, in Applied Surface Science, Vol. 154-155, Seite(n) 365-368, 2000, ISSN: 1873-5584
Original Titel:
On the reaction mechanism in laser-induced deposition of Tungsten microstructures from WF6/H2