Characterization of Silver Microheaters for Tamm Plasmon-Polariton Enhanced Resonant Thermal Emission
Sprache des Vortragstitels:
Microelectronics System Symposium
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We designed, simulated and experimentally characterized thin silver microheater structures placed on a dielectric multilayer membrane, which utilizes the concept of resonantly enhanced thermal emission by Tamm plasmon-polaritons. Such a configurations achieves selective and coherent thermal emission on the backside of the multilayer membrane. The dielectric stack also is responsible for the thermal insulation, i.e. is preventing heat to be conducted away into the silicon substrate. However, the large fractions of silver demanded by the plasmonic heater concept seem to contradict the goal of high thermal insulation for efficient heating. A lumped parameter model together with FEM simulations were applied to estimate the impact of a better thermal decoupling of the heating area from the substrate. The CMOS-fabricated microheater structure has a high fractions of silver on the area of the membrane. We suggest that operation temperatures up to 700 K (suitable for mid IR region) could nearly be reached in finite-element simulations and experiments at the center of the membrane, despite significant conductive losses. The fabricated heaters showed promising thermal and spectral properties, making the structures suitable for a source for optical on-a-chip mid-infrared sensing.