Modeling of a CMOS-Compatible Slab Tamm Plasmon Absorber using N-Type Silicon
Sprache des Vortragstitels:
IEEE SENSORS 2019
Sprache des Tagungstitel:
We present a concept for a resonant absorber structure featuring high compatibility with CMOS technology in a slab design, which is suitable for integration with slab waveguides. Finite-element simulations were used together with the Transfer-Matrix Method and genetic-algorithm optimization in order to model the optical resonators. These absorbers are based on so-called slab Tamm plasmon (STP) structures. Depending on the slab thickness relative absoptances up to 70 % were achieved for an incident guided slab waveguide mode. Only silicon based materials are used in the design of the STP absorbers. This facilitates the fabrication process, as metals are omitted in the components of the structure.